Semiconductor / Pharmaceutical

Semiconductor / Pharmaceutical — standard dust collection design

Dust characteristics

• Dust: Fine particles + toxic gas
• d50: 0.3 μm
• Particle density: 1500 kg/m³

Gas conditions

• Operating temperature: 50°C
• Typical concentration: 0.01 g/Nm³

Standard train

HEPA cartridge → Wet scrubber (toxic)

Target outlet: 1 mg/Nm³

Typical Semiconductor / Pharmaceutical values are prefilled — replace them with your site data.